Problem NO: 27

The yield of good chips in multiprobe for a certain batch of wafers is 83%. The wafers have a\ndiameter of 150 mm with a processable area that is 140 m

The yield of good chips in multiprobe for a certain batch of wafers is 83%. The wafers have a

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diameter of 150 mm with a processable area that is 140 mm in diameter. If the defects are all

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assumed to be point defects, determine the density of point defects using the Bose-Einstein method

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of estimating yield.

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